MEMS扭转微镜静态特性的温度效应分析

Analysis on temperature effect of the static characteristics of MEMS torsional micro-mirror

文章从静电力驱动的扭转微镜的静态特性静力学模型出发,分析了扭转微镜静态特性的温度效应.对两组不同尺寸、四种常用材料微镜的吸合电压、释放电压以及偏转角与驱动电压关系,随温度的变化规律进行了数值仿真分析;并采用典型电压值的增量百分比随温度变化的斜率,来量化描述并对多晶硅、polyimide、PDMS和SU-8四种材料的扭转微镜的静态特性受温度的影响.其中SU-8材料的微镜受温度的影响最大.而不同尺寸同种材料的微镜,其静态特性受温度效应影响的程度相同.为扭转微镜使用过程中如何降低温度效应的影响提供了依据.

A method of analysis on the temperature effect for electrostatic force driving MEMS torsional micro-mirror is introduced. The trend of temperature effect on pull-in voltage, release voltage, and the angle vs. driving voltage relationship of MEMS torsional micro-mirror with two different sizes and four different materials, have been analyzed numerically. And the slope of increase percentage of typical voltages vs. temperature is adopted to compare the level of temperature effect for different micro-mirror quantitatively. The results show that the pull-in angle and the release angle are determined by the mirror sizes rather than the temperature whereas the pull-in voltage and the release voltage are determined by the material properties rather than the mirror sizes. Among the sequence of torsional micro-mirror made of materials of poly-silicon , polyimide , PDMS and SU-8 , the temperature effect increases. Namely, the torsional micro-mirror made of SU-8 has worst thermal stability.