飞秒激光全息加工光学系统搭建与分析

Analysis and Set Up of Optical System for Holographic Femtosecond Laser Processing

合理的光学系统设计及参数优化是飞秒激光全息并行加工系统功能实现的前提。在分析了飞秒激光全息并行加工系统光路设计要求的基础上,对其中的两个关键点进行了较为深入的研究。采用能量利用率高的斜入射方式照射选用的空间光调制器,得出了后续光路设计的关键参数;通过光学理论推导出空间光调制器与两个透镜组成的4-f系统中最佳光路参数,利用Zemax软件对光路中系统孔径仿真,验证了该方案的合理性;搭建了一套合理高效的飞秒激光全息并行加工系统,实现了7焦点阵列的微透镜和微齿轮并行加工。研究结果表明,该光路设计方案可以实现高效的飞秒激光全息加工过程。

Reasonable optimal system design and parameter optimization are prerequisite to achieve the functions of holographic femtosecond laser processing system. Based on the analyses of the requirements of the optical parameters of the holographic processing system, this paper makes an intensive study of the two key parameters. The oblique way which is more energy efficiency to irradiate the spatial light modulator is used to calculate the limiting conditions of the follow-up optical path design. Using the spatial light modulator and 4-f system which contain two lenses according to the demands of optical transmission, the optimal optical parameter design by deriving from the optical theory is given, and furthermore, the aperture simulation of the optical system with Zemax software identifies the rationality of the scheme. Finally, a reasonable holographic processing system is set up, and seven focus microlens arrays and micro gear parallel processing are achieved, respectively. Studies show that this optical design program can efficiently achieve the process of holographic femtosecond laser processing.