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Substrate temperature effects on the structural and photoelectric properties of ZnS:In films

Substrate temperature effects on the structural and photoelectric properties of ZnS:In films
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摘要 Indium doped ZnS (ZnS:In) films were prepared on glass substrate using thermal evaporation technol- ogy. It was found that the structural, optical and electrical properties of ZnS:ln films strongly depend on the substrate temperature (Ts). By X-ray diffraction (XRD), atomic force microscopy (AFM), transmittance spectroscopy, and electric performance measurements, the effect of Ts on ZnS:In film is studied in detail. It reveals that Ts has impor- tant effect on ZnS grain size, crystallinity, lattice disorder, etc., which further leads to the obvious influence on its optical and electrical performance. Under the optimized Ts, the performance, especially the conductivity, achieved in this work is far higher than that reported for other n-type ZnS films. Indium doped ZnS (ZnS:In) films were prepared on glass substrate using thermal evaporation technol- ogy. It was found that the structural, optical and electrical properties of ZnS:ln films strongly depend on the substrate temperature (Ts). By X-ray diffraction (XRD), atomic force microscopy (AFM), transmittance spectroscopy, and electric performance measurements, the effect of Ts on ZnS:In film is studied in detail. It reveals that Ts has impor- tant effect on ZnS grain size, crystallinity, lattice disorder, etc., which further leads to the obvious influence on its optical and electrical performance. Under the optimized Ts, the performance, especially the conductivity, achieved in this work is far higher than that reported for other n-type ZnS films.
出处 《Journal of Semiconductors》 EI CAS CSCD 2014年第2期20-23,共4页 半导体学报(英文版)
基金 Project supported by the National Natural Science Foundation of China(No.61366006) the National Natural Science Foundation of Fujian Province(No.2009J05146)
关键词 ZNS INDIUM EVAPORATION photoelectric properties substrate temperature ZnS indium evaporation photoelectric properties substrate temperature
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