摘要
研究了利用微波等离子体化学气相沉积方法制备的金刚石膜的拉曼光谱 ,讨论了金刚石膜中的非金刚石碳相与甲烷浓度、基板温度之间的关系 .
In the paper, Raman spectroscopy of diamond films grown using microwave plasma chemical vapour method was invistigated, and discussed relation between non diamond carbon phase in the diamond films with methane concentration and substrate temperature.
出处
《延边大学学报（自然科学版）》
CAS
2000年第4期282-284,共3页
Journal of Yanbian University（Natural Science Edition）
