摘要
微夹持器作为末端执行装置,直接决定了微装配的效率。MEMS机构中包含许多微小的活动部件和功能元件,为实现这些微小器件的稳定夹取和自动装配,设计了一种采用压电陶瓷驱动、基于柔性铰链的二级放大微夹持器结构。对该微夹持器的节点应力、刚度及最大张合量等进行了分析计算,并对微夹持器进行了试制。实验与分析结果表明,该夹持器最大张合量是245μm,放大倍数约为12.3倍,满足MEMS机构的装配要求。在此基础上,重点对张合量与夹持力进行了系统测试,通过对测试数据的非线性回归,推导出99.99%可靠度的驱动电压计算公式,实现了微夹持的精确控制。
Micro--gripper as end devices, directly determined the efficiency of the micro--assembly. MEMS mechanism contained many tiny moving parts and functional elements, so as to achieve the stabally gripping and automatic assembly of these tiny devices. A micro--gripper with two grade displacement amplification was designed, which was actuated by piezoelectric ceramics and based on flexible hinges. The micro--gripper node stress, stiffness and maximum deformation, etc. were ana- lyzed and calculated, and the micro--gripper prototype was produced. The experimental results show that the maximum deformation levels of the gripper is as 245 um, the magnification is about 12.3 times, that meets the requirements of MEMS micro--assembly. On this basis of above, the deforma- tion and gripping force were focused on, and a formula of 99.99% reliability drive voltage was derived by nonlinear regression of the test data, and the precise control of the micro--gripper is achieved.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2014年第5期596-601,共6页
China Mechanical Engineering
基金
国家高技术研究发展计划(863计划)资助项目(2009AA04Z167)
辽宁省自然科学基金资助项目(201102182)
关键词
微机电系统
微装配
微夹持器
压电陶瓷
柔性铰链
非线性回归
micro-- electro mechanical system （MEMS）
micro-- assembly
micro-- gripper
pi-ezoe-- lectric transducer（PZT）
flexible hinge
nonlinear regression
