摘要
采用微石英晶振来取代传统SPM的具有复杂结构的微悬臂和激光位移检测装置 ,使成本极大地下降。采用锁相环电路可将系统频响从 1Hz提高到 1kHz,通过对光栅试件的检测 ,证明这种检测方法是可行的。同时在微石英晶振前端安装不同种类的细针 ,可实现STM、AFM、MFM和EFM的测量 ,构成一机多能系统。
The cost is greatly reduced when a 32.678 kHz quartz resonator with a simple structure and of low cost replaces a, micro cantilever and laser detection device with the complicated structure of a scanning probe microscope (SPM). A phase locked loop is used to drive the mechanical oscillator in order to achieve a fast frequency response. A topography of a grating is obtained through this method, that is proved to be a feasible one. A STM, AFM, MFM, and EFM can also be run by changing different kinds of tips in the front of the quartz resonator and thus many functions can be realized.
基金
高等学校博士学科点专项科研基金资助项目! (970 4870 7)
