带铁磁薄膜悬臂板的磁场微感应器磁弹性特征研究

AN ANALYSIS ON CHARACTERISTIC OF MAGNETOELASTICITY OF A MAGNET FIELD MICROSENSOR MADE OF CANTILEVERED PLATES WITH FERROMAGNETIC FILMS

对于在可变形非磁材料悬臂梁式板单表面粘贴可磁化材料薄膜所构成的磁场微传感器件结构 ,研究了其处在磁场环境中的磁弹性弯曲变形的磁场 力学特征 .为此 ,建立了由有限元方法分析磁场与有限差分法计算挠曲变形相结合来计算其结构在磁场中产生磁弹性变形的定量分析程序 .在此基础上 ,对于这一微传感结构的算例给出了其结构变形随外加磁场环境变化的磁场 挠度特征关系等定量结果 .结果表明 :微传感器件不仅可以测量出磁场的大小 ,而且给出了测量磁场矢量方向的可能性 .

The purpose of this paper is to study the magneto mechanical characteristic of a microsensor which is composed of a cantilevered beam plate with ferromagnetic films in order to measure magnetic fields from the deformation of plate when the microsensor is located in the magnetic fields. To this end, a numerical approach combined by the finite element method for magnetic fields and the finite difference method for deflection of the microsensor is proposed to analyze quantitatively the deflection under magnetoelastic interaction. After that, some quantitative results of a case study for the magnetoelastic characteristic between magnetic fields and deflection of the microsensor in the magnetic fields are given in details. The results show that this microsensor is not only used to measure the magnitude of magnetic intensity, but also applied possibly to monitor the direction of vector of the magnetic field.