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晶圆清洗机无刷电机齿槽转矩的仿真分析

Simulation Analysis of Cogging Torque of Brushless DC Motor Used in Wafer Cleaning Machine
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摘要 齿槽转矩对无刷电机低速性能产生重要影响.采用计算机仿真方法研究晶圆清洗机无刷电机的齿槽转矩问题,包括极槽配合、磁极以及定子斜槽/转子斜极对无刷电机齿槽转矩的影响,在此基础上提出晶圆清洗机无刷电机的优化设计方案. The cogging torque results in the low speed performance of brushless DC motors. In this paper, the cogging torque of wafer cleaning machine brushless DC motor was researched by computer simulation, including the influence of the slot/pole combination, skewing slot/skewing magnet pole. On this basis, the optimal design of wafer cleaning brushless DC motor was proposed.
作者 李新华 杜成飞 黄贤蕾 杨垂恭
机构地区 湖北工业大学电气与电子工程学院 台湾阪神电机有限公司
出处 《湖北工业大学学报》 2014年第1期7-11,共5页 Journal of Hubei University of Technology
关键词 晶圆清洗机 无刷电机 齿槽转矩 脉动转矩 计算机仿真 wafer cleaning machine brushless DC motor cogging torque ripple torque computer simulation
分类号 TM351 [电气工程—电机]
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参考文献5

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共引文献11

湖北工业大学学报
2014年 第1期

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