FMCS在半导体工厂项目上的设计应用

Design and Application of FMCS in Semiconductor Manufacture Industry Project

采用FMCS系统来满足上海晟碟半导体二期项目控制集成需求,主要从PLC控制、DDC控制等方面进行了全面设计及运行方案的论述。

This paper introduces the application of FMCS system in Shanghai SanDisk phase II project to meet integrated control requirement.The design and operation description mainly from three aspects：PLC control and DDC control.