摘要
介绍了干涉显微镜测量原理、仪器结构、空间分辨率和测量范围,分析了测量误差产生的原因,通过实验表明:干涉显微镜能够比较真实地反映超光滑表面微观形貌特征。
This paper introduces the measuring principles,instrument structures ,spacial resolutions and their application domain of interomicroscopy.The measuring errors are also analyzed ,the results show that interomicroscopy can measure truly the characteristic of ultra-smooth surface microtopography,it is a useful tool in measuring of ultra-smooth surface microtopography.
出处
《佳木斯大学学报（自然科学版）》
CAS
1999年第4期420-424,共5页
Journal of Jiamusi University：Natural Science Edition
