摘要
The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C-C, sp2C-N, and sp3C-N. The TiN inter-layer cause the adhesion of CNx films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCrl5 steel balls, but the wear rates decreased.
The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C-C, sp2C-N, and sp3C-N. The TiN inter-layer cause the adhesion of CNx films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCrl5 steel balls, but the wear rates decreased.
基金
supported by the International Science and Technology Cooperation Program of China(No. 2008DFA51470)
