溶胶-凝胶法制备(Ba_(0.5)Sr_(0.5))TiO_3铁电薄膜及电性能研究

The (Ba_(0.5)Sr_(0.5))TiO_3 ferroelectric thin films prepared by sol-gel precessing

研究了一种以水为溶剂的 (Ba0 .5Sr0 .5)TiO3(BST)源溶液 ,用Sol -Gel技术制备出BST薄膜 ,并研究了薄膜的结构和电性能 .结果表明 ,厚度为 16 0nm ,70 0℃保温 1h的 (Ba0 .5Sr0 .5)TiO3 薄膜呈现纯钙钛矿结构 ,在室温下 ,介电常数为 2 2 0 ,介电损耗为 0 .0 47,漏电流密度为 8.0× 10 -8A/cm2 .进一步研究发现 ,随着烧结温度的升高 ,薄膜的介电常数增高 。

The (Ba 0.5 Sr 0.5 )TiO 3 ferroelectric thin films (160?nm) have been prepared at 700?℃ with heat preservation for 1?h by sol-gel method. The BST thin films exhibit good performance with dielectric constant of 220, a dissipation factor of 0.047, a leakage current density of 8.0×10 -8 A/cm 2. The dielectric constant of the BST films increases with the increasing of the sintering temperature, simultaneity, the dissipation factor declines.