摘要
介绍了纳米压痕技术的原理和方法.采用三角锥形Berkovich金刚石压头对Li2O-Al2O3-SiO2微晶玻璃的超光滑表面(Ra=0.079 nm)进行了纳米压痕实验.结果表明,当载荷低于300 mN时,微晶玻璃表现出延性特性.此外,在不同的载荷条件(20 mN^300 mN)下微晶玻璃的硬度和弹性模量存在较大的差异,分析其原因分别是纳米压痕的尺寸效应和材料发生了塑形变形.通过将实验得到的微晶玻璃的纳米硬度值与传统计算方法得到的硬度值进行比较,发现传统方法得到的硬度值较大,其原因是传统硬度计算方法忽略了材料的弹性恢复.
The principle and methods of nano-indentation technology are introduced in this paper. Using a triangular pyramid Berkovich diamond indenter with a sharpened tip, nano-indentation experiments were carried out to test the ultra smooth surface （Ra = 0. 079 nm） of glass-ceramic in the Li2O-Al2O3-SiO2 system. Experiments reveal the plastic property of glass-ceramic when the maximum load of indenta- tion is less than 300 raN. Moreover, the hardness and elastic modulus tests of the glass-ceramic with dif- ferent loads（20 mN--300 raN） were carried out, and the results show that the hardness and elastic mod- ulus are quite different under different loads due to the size effect and the plastic deformation of material. Through comparison of tested nano-hardness value of glass-ceramic and calculated hardness value through the conventional method, the latter value is found higher, because the material＇s elastic recovery property has been neglected in the conventional method.
出处
《纳米技术与精密工程》
CAS
CSCD
2014年第2期147-150,共4页
Nanotechnology and Precision Engineering
基金
国防基础科研项目资助(A0520110054)
关键词
纳米压痕
纳米硬度
超光滑表面
nano-indentation
nano-hardness
ultra smooth surface
