线结构光传感器中非线性光源单向扩展光路设计

Unidirectional expanding optical path design for nonlinear source in line-structured laser sensor

为了减小线结构光传感器光源对测量精度的影响 ,设计了一种集整形和能量校正为一体的非线性光源单向扩展光路。应用反高斯分布的液体吸收滤光镜 ,实现了高斯光束强度的径向均匀化。并应用矩形光阑和两个相互垂直放置的柱面镜 ,对准直后的激光束进行整形 ,分别在不同的方向进行拉伸和压缩 ,得到了形状理想的线光源。此技术已成功应用于BGA芯片管脚的三维尺寸测量中。

In order to reduce the effect of line-structured laser source on the measuring accuracy, a unidirectional expanding optical path for the nonlinear source is presented, which can accomplish shaping and intensity correction of Gaussian beam Adopting an anti-Gaussian liquid absorption filter lens, the uniformity of radial intensity of laser source is realized By means of the rectangular diaphragm and two orthogonal cylinder lens, the collimated laser is shaped, which is stretched and compressed respectively in two different directions, and the line source with ideal shape is achieved This technique has been successfully applied in the three-dimensional measurement of BGA chip leads