摘要
分析了激光自混合干涉仪位移测量误差及特点 ,提出了干涉仪的设计原则。对激光自混合干涉仪的系统稳定性与测量分辨力进行了实验研究 ,给出了改善系统稳定性与测量分辨力的有效方法。
Displacement measurement error and its character of self-mixing interferometer were analyzed. The design ruler of self-mixing interferometer was presented. The system stability and measurement resolution were experimentally studied, and the method for improving system stability and measurement resolution was given.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2001年第1期29-32,共4页
Chinese Journal of Lasers
基金
国家自然科学基金!(编号 :5 96 75 0 77)资助项目
关键词
自混合干涉仪
半导体激光器
位移测量误差
Error analysis
Measurements
Semiconductor lasers
System stability
