叉指式微结构加速度传感器刚度的力法求解

A force method for the solution of structure stiffness of an interdigital microaccelerometer

采用结构力学的力法，建立了求解叉指式微结构加速度传感器刚度的力学模型。与材料力学方法相比，简化了推导过程，得到了便于微机计算的结论。

Mechanics model of microaccelerometer was set up by using force method. Compared with material mechanics method, the process is concise and suitable for computer calculating.