电感耦合等离子体在不同操作条件下的温度和电子密度的测定——Ⅱ.电子密度的测定

THE MEASUREMENT OF TEMPERATURES AND ELECTRON NUMBER DENSITIES IN A INDUCTIVELY COUPLED PLASMA UNDER DIFFERENT OPERATING CONDITIONS——Ⅱ. The Measurement of Electron Number Densities

引言等离子体的温度和粒子密度是等离子体的两大基本参数,其中温度是考察等离子体的特性及使操作条件最佳化的关键。等离子体的温度有气体动态温度,激发温度,电子温度和电离温度。气体动态温度有分子旋转谱线法和Doppler加宽法,激发温度有两谱线法和Boltzmann斜率法。

The gas kinetic temperatures, excitation temperatures and ionization temperatures in the central channel of ICP were measured under the different observation height, plasma gas velocity and high-frequency power by the use of OH rotation lin method, Boitzmann slop method and Boltzmann-Saha method respectively. The results show the gas kinetic temperature not to be influenced from operating condition, but excitation temperature and ionization temperature to be influenced appreciably. The values obtained show: Ionization temperature, Electron temperature>Excitation temperature>Gas kinetic temperature This demonstrates inductively coupled plasma to be not in local temperature equilibrium (LTE) obviously.