摘要
选用两种不同形貌的钼粉,经过压制、烧结、轧制、退火得到靶材产品,通过对金相组织的分析,得出颗粒大小均匀、无团聚的钼粉制备出的靶材组织较好,且大变形量有利于得到细小的组织结构。
Molybdenum sputtering target was processed by pressing, sintering, roiling and annealing, taken aggre- gative and dispersed powder respectively as samples. Structure of molybdenum sputtering target was analyzed by metallographic. Results have shown that the molybdenum sputtering target by processing with the dispersed molyb- denum powder has better structure than others.
出处
《中国钼业》
2014年第1期48-49,共2页
China Molybdenum Industry
基金
国家"十二五"科技支撑项目:钨
钼的增值化利用产业化技术开发(2012BAE06B02)
关键词
钼粉
溅射靶材
微观组织
molybdenum powder
sputtering target
microstructure
