摘要
针对目前时栅转台采用手动方式进行标定,工作效率低、精度难以保证的现状,设计了一种能够进行数据采集、处理和误差补偿的时栅转台自动标定系统。该系统以激光干涉仪作为测量基准,采用了闭环控制技术,进行测量误差补偿。实验结果表明:该系统标定精度高,经过该系统标定后的时栅转台精度达到±2″,且标定速度是手动方式的2倍以上,显著提高了时栅转台标定效率。
Aiming at present state of low efficiency and precision is hard to guarantee in the process of manual calibration of time-grating turntable,an automatic calibration system with which can carry out data acquisition, processing,and error compensation for time-grating turntable is designed.Closed-loop control technology measurement error compensation,the system takes laser interferometer as measurement standard.Experimental result shows that the turntable precision can reach ± 2″ after calibration and the calibrating speed is twice more faster than manual mode,the calibration efficiency of time-grating turntable is significantly improved.
出处
《传感器与微系统》
CSCD
北大核心
2014年第3期107-109,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51127001)
国家"863"计划资助项目(2012AA041202)
重庆市两江学者资助项目
关键词
时栅传感器
转台
自动标定
误差补偿
time grating sensor
turntable
automation calibration
error compensation
