软X射线散射法检测超光滑表面粗糙度

The Roughness Measurement for Supersmoothed Surface by Using Soft X-ray Scattering Method

本文概略介绍了软X射线散射法检测超光滑表面粗糙度的散射理论、测试方法及测试系统。

This paper reports brieftly the scattering theroy,the testing method and facility system for measuring the supersmoothed surface roughness by using soft X-ray scattering method.