激光等离子体X射线源及应用

Laser Plasma X-ray Source and Its Applications

高功率激光经聚焦后,靶面吸收束能迅速变成等离子体并转变为高温热辐射X射线源。激光等离子体X光源在科学与技术领域有广泛应用,包括X光谱学、X光显微术、X光刻、辐射计量、材料及仪器X光射性检测、高温高密度天体物理、X激光及激光核聚变、EXAFS等。本文讨论激光等离子体形成的物理过程及影响X光辐射的诸因素,重点介绍在X光刻及X光显微镜方面的应用。

The principles and current research results of laser produced high temperature plasma are shortly reviewed. X-ray radiation form such plasma and the dependence of X-ray radiation on target materials and laser parameters (such as power pulse width, wayelength, etc.) are descr- ibed. The applications of laser plasma as X-ray source in X-ray lithography, X-ray microscopy are discussed.