多层膜软X光反射镜

Multilayered Soft X-ray Mirrors

复旦大学物理系激光研究室从1984年开始软X光反射镜的研制工作。六年来,进行了超薄多层膜的膜厚监控的方法研究、单层超薄金属膜的特性研究、Ni-C和Mo-Si多层膜软X光反射镜的制备与测试以及用PVD与LB技术相结合制备软X光反射镜。本文详细介绍了这些工作。

The principle, fabrication, and test of multilayered mir- rors in soft X-ray region are described. The authors also introduce their current researches and results, which incl- ude the study of thickness control, the characters of sup- er-thin metal monolayer, the fabrication and test of Ni-C, Mo-C multilayers, and making multilayers by using th co- mbination ob PVD and LB technologies.