摘要
软X线-真空紫外辐射计量测试工作发展十分迅速。描述我们研制成功的真空紫外稀有气体电离室绝对型探测器的工作原理、结构和性能。讨论基于McPherson 247掠入射真空紫外单色仪的探测器性能测试装置及性能评价结果。
With the development of space science, plasma physics and sho- rt wavelength laser study in recent years, there is a great progress on soft X-ray and Vacuum Ultraviolet spectral radiation metrology. This paper discusses the operating principle, the structure and the performance of VUV rare gas ionization chamber standard detector developed in this Lab, describes the evaluating equipment of the de- tector performance which is based on McPherson 247 grazing incide- nce VUV monochromator, and finally presents the measurement res- ults.
出处
《光学机械》
CSCD
1991年第3期6-11,共6页
基金
国家自然科学基金
