超精密齿距偏差测量中测点位置的误差补偿

Error compensation of the measurement position in ultra-precision gear pitch deviation measurement

为实现测点位置难于布置到被测齿轮分度圆上超精密齿轮齿距偏差的测量,对测头直径及测点位置参数对齿轮齿距累积偏差测量的影响进行了理论分析与实验研究。首先建立了测头直径和测头位置参数与齿距累积偏差的映射关系;然后推导出齿距累积偏差测量中的测点位置误差补偿系数;最后通过一组精密测试实验,证实了不同测量圆上获取的齿距偏差示值之间的存在差异,然而通过引入测点位置误差补偿系数将其折算到被测齿轮分度圆上,得到的齿距累积偏差值基本一致。本例中,不同测量圆上两次获取的齿距累积总偏差测量结果的最大差值仅为0.09μm,平均差值仅为0.04μm。实验结果表明了所建测点位置补偿模型的正确性与超精密齿距偏差测量中测点位置误差补偿方法的可行性。

In order to solve the problem that the measurement position is difficult to be arranged on the gear reference circle in ultra-precision gear pitch measurement,the theoretical analysis and experiment study were conducted on the effects of the probe diameter and the measurement position parameter on the measurement of the gear pitch cumulative deviation.First,the mapping relationship between the probe diameter,the measurement position parameter and the gear total cumulative pitch deviation is established.Then the error compensation coefficient of the measurement position in gear pitch cumulative deviation measurement is deduced.Finally,a group of precision tests prove that the indicating values of the gear pitch deviations obtained on different measurement circles are different ; however,the gear total cumulative pitch deviations,which are calculated by introducing the error compensation coefficient of the measurement position and are converted to the reference circle of the gear under test,are basically consistent.The maximum difference of two gear total cumulative pitch deviations obtained on different measurement circles is only 0.09 μm and the mean difference is only 0.04 μm in this example.The experiment results show the correctness of the proposed error compensation model and effectiveness of the error compensation method of the measurement position in ultra-precision gear pitch deviation measurement.