复合热释电薄膜红外探测器的制备和性能测试

Fabrication and Properties of the Multi-layer Pyroelectric Thin Film Infrared Detectors

为解决热释电薄膜红外探测器中的热损失问题 ,引入了复合热释电薄膜的概念 .它利用多孔二氧化硅具有的低热导率特点 ,有效地减少了热量从热释电层向衬底的热扩散 .利用溶胶 凝胶和金属有机物热分解等工艺制备的复合热释电薄膜红外探测器 ,在温度为 4 2 0K、频率为 10Hz时 ,电压响应率约为 140 0V/W ,探测器的星探测率D ( 4 2 0 ,10 ,2 )为 9 3× 10 7cm·Hz1/2 /W .

In order to reduce the thermal dissipation from the pyroelectric film to the substrate and meet the needs of integration with silicon, the multi-layer pyroelectric thin film (MPTF) was introduced. It is mainly composed of pyroelectric sensitive layer-lead titanate, thermal isolating layer-porous silicon dioxide film, and the buffer layer-dense silicon dioxide film. A pyroelectric measuring system was built to measure the infrared response of the detector. The voltage response and the specific detectivity of the detector were given too.