摘要
提出了一种直接评价CVD金刚石磨损性能的实验方法,比较研究了热丝CVD法、微波等离子体CVD法和直流电弧等离子体CVD法制备的金刚石的磨损性能。研究结果表明:影响CVD金刚石磨损性能的主要因素是非金刚石相的相对含量,金刚石的内应力和晶粒大小对磨损性能的影响较小。
An experimental method is presented to evaluate the wear properties of prepared by hot filament method, microwave plasma method and DC arc plasma respectively. The results show that the main factor which affects the wear properties o film is the relative content of non-diamond phase and that the internal stress and grain film act little effect on the wear properties. CVD diamonds CVD method, f CVD diamond size of diamond
出处
《金刚石与磨料磨具工程》
CAS
2014年第1期15-17,共3页
Diamond & Abrasives Engineering
基金
国家自然科学基金(10875093)资助项目
关键词
CVD金刚石
评价方法
磨损性能
拉曼光谱
CVD diamond
evaluation method
wear performance
Raman spectroscopy
