静电放电抑制器的时域矩量法分析

Time-domain Moment Method Analysis on ESD Suppresser

静电放电抑制器是一种静电放电保护电路,在射频和微波集成电路中起到非常重要的保护作用。给出了静电放电抑制器的理论模型。利用时域矩量法分析了三种结构的超低电容静电放电抑制器的电容、电场与电荷分布。数值计算结果表明放电时产生的最大电场均大于空气中击穿的阈值电场,其中弧线形放电抑制器的电场最大,而锯齿形放电抑制器可发生多点击穿,提高了系统设计的可靠性。

Electrostatic discharge （ESD） suppressor is a kind of electrostatic discharge circuit, designed for protection of RF and microwave frequency band ICs. The theoretical model of ESD suppressor is present, and the capacitor, electric field and charge distribution of ESD suppressor with three different structures are analyzed through time-domain moment method （TDMM）. The result shows that maximum electrical fields in discharge mo- ment of all the there models are all higher than threshold field of air breakdown. The maximum electrical field is generated by curvature radius suppressor, while zigzag suppressor can generate multi-point breakdown which benefit for system design reliability.