各向异性表面的椭偏测量的消光过程

Nulling procedures used in the ellipsometry for anisotropic surface

本文描述了在正向入射条件下,当待测的各向异性反射面(如全息光栅)的两个笛卡儿本征矢方向与系统的指向有微小偏离时,椭偏测量的消光过程由理想的两步过程转变成多步过程。文中同时定量指出该偏离所造成的影响及应用。

This paper describes the nulling procedures used in the ellipsometry for anisotro pic surface (e.g., holographic grating) transformed into multi-step regulations from ideal two-step ones, if the orientation of two cartesian eigenvectors of the sample surface deviate a small angle from that of ellipsometer. The influence of this devation and its application are also discussed.