摘要
本文介绍在SPG-Ⅰ和SPG-Ⅱ型数字干涉仪的基础上最近又研制成功CQG-Ⅰ数字式车间球面干涉仪的情况。菲索型的球面共心干涉系统,用立式承座支撑样板与工件,可以快速在监视器上显示光圈数;也可以在微机上显示局部误差的PV值与Rms值,测量精度为λ/20。仪器口径为φ60mm,F数为10～0.74,仪器的标准镜头引用了非球面及仪器采用双工作台,从而,使仪器的质量及功能均有提高与扩大。
This paper describes a digital spherical wavefront interferometer of type CQG1 which has been designed recently based on SPG-I type and SPG-II type digital wavefront interferometers. This is a successful instrument for testing optical spherical surfaces and other optical surfaces in optical shop. The measured number of rings as well as PV and RMS value of irregularity can be displayed on CRT of microcomputer.The accuracy is λ/2. The aperture of the interferometer is φ60mm.
出处
《光学仪器》
1991年第4期5-10,共6页
Optical Instruments
基金
机电部基金(86J71028)
