莫尔偏转法测量相位物体的灵敏度和分辨率分析

The Sensitivity and Resolution for Measuring Phase Objects by Moire Deflectometry

本文分析了利用莫尔偏转法测量相位物体的灵敏度和分辨率,给出了空间分辨率和角分辨率公式,提出了此种方法的极限分辨率和灵敏度。

In this paper the sensitivity and resolution for measuring phase objects by Moire deflectometry are analysed, the spatial resolution and angular resolution are given and the limits of the sensitivity and resolution are derived.