摘要
光学干涉计量与电视图象处理技术结合具有测量精度高和实时性好的优点。文章讨论了光学干涉计量的干涉图解析法和辅助位相扫描法,介绍了电视图象处理技术。最后给出了新近研制的用于表面槽深检测的系统实例。仪器测试精度优于2nm,测试时间(以10次采样计)小于1分钟。
Combninig the technique of optical interferometry and TV image processing has the advantage of high measuring accuracy and real time response. This paper introduced the analytical method of interferogram, the subfringe interferometry and the TV image processing technique. Finally. the TV image processieg system newly developed for measuring the depth of phase grating is shown as an example. The precision of that instrument is better than 2 nm. It takes less than 1 minute for measuring 10 samples.
出处
《光学仪器》
1991年第5期6-10,共5页
Optical Instruments
