圆光栅刻划偏心分析与调整

The Analysis and Adjustment of Division Offset of Cirdular Gratings

本文通过对圆光栅刻划偏心与莫尔条纹图案特性之间对应关系的分析讨论,提出了在圆刻机上调整刻划偏心大小及方向的具体方法。

By means of analysing and discussing the correspondence relationship between the division offset sf circular gratings and pattern characteristic of Moir'e fringe, this paper presents the specific way of adjusting division offset on circular dividing machine.