旋转双光楔光路引导系统Matlab仿真研究

Simulation study of rotating double optical wedge vectoring optics path based on Matlab

由于光楔在高精度微孔加工中起着对激光光束引导作用,为了提高激光微细孔加工质量,给出了一种提高光楔对激光微加工精度分析的方法。首先提出了单光楔矢量等效概念,基于单光楔矢量定义对双光楔矢量模型进行了建立与分析,并得出了多个光楔进行矢量叠加的新方法;其次,应用Matlab编写了仿真软件,仿真得出了激光束经过两个相同光楔后的轨迹,并指出了由于运动系统的不同步对激光微孔加工中打孔质量的影响,进行了误差定量分析并给出了误差计算公式。文中结论对高精度激光微孔加工控制系统设计时的性能指标提供参考。

The optical wedge plays a guiding and key role on the processing of high-precision micro-hole drilling by laser pulses. In order to improve the laser micro-hole processing quality, a method was presented to improve the analysis on the impact of the optical wedge on accuracy of laser micro-manufacturing. First the concept of the equivalent of a single wedge vector was proposed. The double wedge vector model was established and analyzed based on the definition of a single wedge vector, and the new method of the vector superposition of the multiple wedges was came up with. Secondly, the simulation software was programmed by using Matlab. The simulation results show the trail of the laser pulses through the double optical wedge. The effect of the quality of the micro-hole caused by the un-synchronization of the motion system is investigated. The deviation quantitative analysis is carried and the formula of calculation the deviation is given. The conclusion is of great value to the performance indicators of designing the controlling system in the high-precision micro-hole drilling by laser pulses.