摘要
用子孔径拼接干涉法来检测大口径光学元件和光学系统是一种成本较低的有效手段。但是随着子孔径数目的增加,拼接得到的面形图中存在着很大的累积误差严重影响了拼接的精度,因此如何简单快速地去除累积误差成为子孔径拼接干涉检测法研究的主要问题之一。文中介绍了一种简单且快速的方法去除拼接中的累积误差。并且对一个大小为180 mm×80 mm的平面镜进行了6个子孔径拼接检测实验。在实验中,文中提出的方法很好的去除了拼接中的累积误差。
Subaperture stitching interferometry is an effective means for measuring optical surfaces and systems. But the more subapertures are used, the more serious effect the accumulative error in stitching has on the accuracy. So finding a simple and fast way to remove the accumulative error is the key for improving subaperture stitching. An effective and quick method to eliminate the accumulative error in stitching was proposed in this paper. The plane mirror which was 180 mm ＆#215;80 mm was tested by six subapertures stitching in the experiment. And the method which was proposed in this paper could get rid of the accumulative error in stitching very well.
出处
《红外与激光工程》
EI
CSCD
北大核心
2014年第3期997-1001,共5页
Infrared and Laser Engineering
关键词
累积误差的去除
子孔径拼接
干涉测量
removing the accumulative error
subaperture stitching
interferometry
