摘要
研究了利用杜邦951 LTCC材料制备的无线无源压力传感器的温漂特性。通过搭建高温测试系统，对传感器0~600℃内的高温特性进行了测试，结果表明传感器存在较大温度漂移。通过制作无腔传感器和LTCC基片上螺旋电感进行高温特性测试，通过对比分析，确定了造成传感器温漂的主要原因是LTCC材料相对介电常数的变化。结合测试数据和公式推导，得出了600℃时杜邦951 LTCC材料的相对介电常数由常温7.8增大到9.04。
Temperatures drift characteristics of wireless passive pressure sensor based on Dupont951 LTCC （ Low-Temperature Co-fired Ceramics） is investigated. By building high temperature test system,temperature characteristic of the sensor is tested within 0 ~600 ℃. Measurement results show rather large temperature drift of the sensor responses. Comparative study is carried out for a fabricated sensor with no-cavity sensing capacitor and on-chip planar spiral inductor under high temperature. The results indicate that the relative permittivity of DuPont951 LTCC material increases from 7 . 8 at room temperature to 9 . 04 at 600 ℃. The conclusion can be obtained that relative permittivity of LTCC material is the main factor which results in great temperature drift of the sensor.
出处
《传感技术学报》
CAS
CSCD
北大核心
2014年第2期190-193,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(51075375)
高等学校优秀青年学术带头人支持计划项目(2013)
关键词
无线无源压力传感器
相对介电常数
谐振频率
温度漂移
LTCC
LTCC
wireless passive pressure sensor
relative permittivity
resonant frequency
temperature drift
