摘要
ZnO基透明导电薄膜是近年来研究的一个热点。总结了近年来掺杂ZnO薄膜,主要有Al掺杂、Ga掺杂、In掺杂和Zr掺杂的一些研究进展,并在此基础上对掺杂ZnO透明导电薄膜的发展进行了展望。
ZnO based conductive thin films is a current research focuses. The progress in techniques of ZnO doping contained Al, Ga, In, Zr and codoping were summarized. The prospect of doped ZnO conductive thin films was also forecas- ted.
出处
《化工新型材料》
CAS
CSCD
北大核心
2014年第3期16-18,共3页
New Chemical Materials
关键词
ZNO
透明导电薄膜
掺杂
研究进展
ZnO, conductive thin film, doping, research progress