批量式等离子清洗机与在线式等离子清洗机的对比

Comparison of Batch Plasma Cleaning with On-line Plasma Cleaning

等离子清洗机的主要原理是利用清洗时高能电子碰撞反应气体分子,使之离解或电离,利用产生的多种粒子轰击被清洗表面或与清洗表面发生化学反应,从而有效地清除各种污染物。针对此,主要使用ANSYS有限元分析软件对批量式等离子清洗机与在线式等离子清洗机反应仓的气流和电磁场进行了仿真分析。实验结果表明,在线式等离子清洗机具有清洗效果好,清洗后不会产生有害污染物、效率高、节省劳动力和安全可靠等优点,具有更广泛的市场前景。

The main principle of plasma cleaning machine is to impact the reaction gas molecules by tfigh- energy electron during cleaning and makes them into dissociation or ionization condition, and bombards the surface to be cleaned or makes chemical reaction with the cleaning surface using a variety of particle production, thereby can effectively remove the various pollutants. In this paper, the finite element analysis software ANSYS is used to simulate the gas flow and the electromagnetic field on the machine reaction chamber of the batch plasma cleaning and the on -line plasma cleaning. The experimental results show that the on -line plasma cleaning machine has a good cleaning effect, which does not produce harmful pollutants after cleaning, and with the advantages of high efficiency,saving labor, safe and reliable. So it has a more extensive market prospect.