期刊文献+

直圆柔性铰链加工误差对刚度的影响和有限元验证

FEA Verification and Influence of Circular Flexure Hinge Machining Error of Stiffness
原文传递
导出
摘要 柔性铰链是一种行程小,定位精度高的传动机构,对加工精度有较高的要求。针对柔性铰链关键尺寸3种不同的加工误差,通过建模和受力分析,推导了直圆柔性铰链存在加工误差时的转动刚度计算公式,以数值积分方法计算刚度误差,并拟合出一种无量纲的刚度误差公式。同时以有限元仿真对计算公式进行验证,对误差曲线进行比较,结果表明了较好的一致性,为柔性铰链的设计和加工提供参考。 Flexure hinge has the characteristics of small stroke and high positioning precision and has higher requirement on machining accuracy. Aiming at the three machining errors of flexure hinge key size, through modeling and force analysis, the calculation formula of rotation stiffness of circular flexure hinge considering the machining errors is derived. The stiffness error is calculated by using nu- merical integration method, and a kind of non--dimensional stiffness error calculation formula is fit out. Meanwhile, the verification on the formula is carried out by using finite element simulation. The stiffness errors of numerical analysis method are compared with and FEA method,the results show that it has good consistency,and a reference for flexure hinge design and machining is provided.
出处 《机械传动》 CSCD 北大核心 2014年第3期109-113,共5页 Journal of Mechanical Transmission
基金 国家科技支撑计划:紫外光学二维微纳几何结构标准装置及标准物质的研究(2011BAK15B01)
关键词 柔性铰链 加工误差 刚度计算 有限元分析 Flexure hinge Manufacture error Stiffness calculation FE analysis
  • 相关文献

参考文献14

  • 1周虎,杨建国,陈少梅.一种微进给辅助支承机构的设计与分析[J].机械设计与研究,2010,26(1):56-60. 被引量:1
  • 2Xu Qingsong, Li Yangmin. Design of a partially decoupled hign precision XYZ compliant parallelmicromanipulator[-C//NEMS 2008 3rd IEEE international conference on Nano/Micro Engi- neered and Molecular Systems, Sanya, 2008 : 13- 18.
  • 3Shiou Fangiung, Chen Chaojung, Chiang Chiajui. Development of a real- time closed- loop micro-/nano- positioning system embedded with a capacitive sensorFJ. Measurement Science and Technology, 2010,21(5) :4007-4010.
  • 4Lee Changwoo, Kim Seungwoo. An ultraprecision stage for a- lignment of wafers in advanced microlithograghyEJ. Precision Engineering, 1997,21 (2/3) : 113- 122.
  • 5Yong Y K, Liu Kexiu, Moheimani S O R. Reducing Cross-Cou- pling in a Compliant XY Nanopositioner for Fast and Accurate Raster ScanningD. Control Systems Technology,2010,18(5) : 1172-1179.
  • 6毕树生,宗光华.柔性铰链微操作机构的误差源分析[J].机械科学与技术,2003,22(4):591-594. 被引量:9
  • 7Niaritsiry T-F, Fazenda N, Clavel R. Study of the sources of inaccuracy of a 3 DOF flexure hinge-based prarallel manipula- tor[-C//Proceeding of the 2004 IEEE international Conference On RoboticsAutomation, New Orleans, 2004 : 4091 -4096.
  • 8Smith S T, Chetwynd D G, Bowen D K. Design and assessment of monolithic high precision translation mechanismsJ. Journal of physics E:Scientific instruments,1987,20(8):977 983.
  • 9秦宇,冯之敬.直梁型柔性铰链制造误差对刚度性能影响的建模与分析[J].中国机械工程,2008,19(18):2182-2185. 被引量:14
  • 10沈剑英,杨世锡,周庆华,严拱标.加工误差影响柔性铰链机构位移性能的有限元分析[J].农业机械学报,2007,38(7):133-136. 被引量:8

二级参考文献46

共引文献69

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部