摘要
利用GaN MOCVD设备的气源输运系统结构,分析了单稀释MO源管路和双稀释MO源管路的工作原理及特点,提出了MO源摩尔流量的计算公式和一种零死区管路设计方案;并且把管路压差控制和气体自动补偿技术应用到了MOCVD设备中。
Use of GaN MOCVD equipment of air transport system seructure,the working princi- ple and characteristics of single dilution and double dilution pipe of MO source are studied. Then the calculation formulas of MO source molar flow and a design version of the pipe without dead space are presented. At last, the technology of pipeline pres- sure control and flow -automatic compensation are integrated into the MOCVD equipment.
出处
《机械与电子》
2014年第3期18-21,共4页
Machinery & Electronics
