基于HAZOP法的太阳能电池厂危险有害因素辨识与分析

Application of HAZOP Analysis Method to Identifying and Analyzing the Dangerous and Harmful Factors in Solar Cell Manufacturer

介绍了危险与可操作性研究(HAZOP)方法的特点及分析过程,并运用HAZOP法对某太阳能电池厂的生产工艺进行了危险有害因素的辨识与分析。结果表明:配置NaOH溶液过程简易,需要改进;扩散炉和镀膜机的进气管道存在安全隐患,应作为日常检查的重点;为了避免NH3泄漏形成爆炸性气体,建议改用N2代替NH3与SiH4反应。该研究对太阳能电池厂生产工艺中存在的危险有害因素的辨识与分析,具有一定的指导意义。

This paper introduces the characteristics and analytical steps of hazard and operability study （HAZOP） and analyzes the dangerous and harmful factors in the production conditions of a solar cell manufacturer by the method of HAZOP. The results indicate that the process of configuring NaOH solution is simple and need to be improved;there is the potential safety hazard in the intake pipe of the diffusion furnace and coater,and the pipe is the key point of daily inspection. The study suggests that Nz be used instead of NH3 to react with Sill4 to avoid the leaking of NH：~. The re- search provides certain guiding significance for identifying and analyzing the dangerous and harmful factors in the pro- duction conditions of solar cell manufacturers.