ICP光源系统的移动台设计

Design of the Movement Station for ICP Light Source System

为改善ICP光源接口的采样能力,引入了一种三维移动装置。光源安装台固定于三维移动装置顶部,构成ICP光源系统移动台。针对移动台的移动精度和行程等需求,对各步进系统的支承、导向和传动结构进行了研究。考虑到设计中可能对光源产生的干扰因素,采用接触式限位开关实现行程保护,并对光源安装台的结构进行了设计。试验结果表明,ICP光源系统移动台通过软件控制能够准确移动至最佳工作位置,有效改善了采样锥对等离子体的采样能力。

In order to improve the sampling capability of the ICP light source interface, the 3D movement device is introduced. The light source mounting base is fixed on the top of the movement device to construct the moving bench of the ICP light source system. In accordance with the movement accuracy and stroke demands, the supporting, guiding and transmission structures of each stepping system are researched. Considering the interfering factors in the design to light source, the stroke protection is realized by adopting contact type limit switches, and the structure of the mounting base of the light source is designed. The experimental results indicate that the movement bench of ICP light source can be precisely controlled via software to reach optimum working position, and effectively improves the sampling capability of the sampling cone to plasma.