摘要
A micro-spectrometer with phase modulation array is investigated in this paper. The vital component of this micro-spectrometer is a micro-interferometer array, which is built on a charge-coupled device （CCD） or a complementary metal oxide semiconductor （CMOS）. Each element of micro-interferometer array is formed by polymethyl methacrylate （PMMA） grooves with different depth. When we illuminate the surface of the interferom- eter array, different interference intensity distribution would be formed at the bottom of each micro-interferom- eter. Optical power of this by the pixels of CCD substituted into a linear interferometer can be measured or CMOS. The data can be system. By solving the linear system with Tikhonov regularization method, spectrum of the incident beam can be reconstructed. Simulation results prove that the detection range of the spectrometer is a wide wavelength range covering from 300 to 1100 nm. Furthermore, the wavelength resolution of the device reaches picometer level. In comparison with conventional spectrometers, the novel spectrometer has distinct advan- tages of small size, low cost, high resolution, wide spectral measurement range, real-time measurement, and so on.
A micro-spectrometer with phase modulation array is investigated in this paper. The vital component of this micro-spectrometer is a micro-interferometer array, which is built on a charge-coupled device （CCD） or a complementary metal oxide semiconductor （CMOS）. Each element of micro-interferometer array is formed by polymethyl methacrylate （PMMA） grooves with different depth. When we illuminate the surface of the interferom- eter array, different interference intensity distribution would be formed at the bottom of each micro-interferom- eter. Optical power of this by the pixels of CCD substituted into a linear interferometer can be measured or CMOS. The data can be system. By solving the linear system with Tikhonov regularization method, spectrum of the incident beam can be reconstructed. Simulation results prove that the detection range of the spectrometer is a wide wavelength range covering from 300 to 1100 nm. Furthermore, the wavelength resolution of the device reaches picometer level. In comparison with conventional spectrometers, the novel spectrometer has distinct advan- tages of small size, low cost, high resolution, wide spectral measurement range, real-time measurement, and so on.
基金
Acknowledgements This work was supported by the National Natural Science Foundation of China （Grant Nos. 6110611, 51172110, 651372119 and 61377019）, the National Basic Research Program of China （Nos. 2012CB933301 and 2009CB930600）, the Research Fund of National Laboratory of Solid State Microstructure （No. M25008）.
