摘要
A1N solidly mounted resonators with silicone microfiuidic systems vibrating in shear mode are fabricated and characterized. The fabrication process is compatible with integrated circuits and the c-axis tilted A1N films are deposited, which allow in-liquid operation through excitation of the shear mode. The silicone microfluidic system is mounted on top of the sensor chip to transport the analyses and confine the flow to the active area. The properties of sensor operation in air, deionized water, ethanol, isopropanol, 80% glycol aqueous solution, glycol, and olive oil are characterized. The effects of different viscosities on the resonance frequency shift and Q-factor of the sensor have been discussed. The sensitivity and Q value in glycol of the sensor are 1.52 MHz cm2/μg and around 60, respectively. The results indicate the potential of a highly sensitive microfiuidic sensor system for the applications in viscous media.
A1N solidly mounted resonators with silicone microfiuidic systems vibrating in shear mode are fabricated and characterized. The fabrication process is compatible with integrated circuits and the c-axis tilted A1N films are deposited, which allow in-liquid operation through excitation of the shear mode. The silicone microfluidic system is mounted on top of the sensor chip to transport the analyses and confine the flow to the active area. The properties of sensor operation in air, deionized water, ethanol, isopropanol, 80% glycol aqueous solution, glycol, and olive oil are characterized. The effects of different viscosities on the resonance frequency shift and Q-factor of the sensor have been discussed. The sensitivity and Q value in glycol of the sensor are 1.52 MHz cm2/μg and around 60, respectively. The results indicate the potential of a highly sensitive microfiuidic sensor system for the applications in viscous media.
基金
Supported by the National Natural Science Foundation of China under Grant Nos 61106070 and 61076049, and the Supply- demand Program of Science and Technology of Wuhan under Grant No 201150124019.
