分布式全光纤微振动传感器研究

Research of All-Fiber Micro-Vibration Multiplexing Sensors

振动主动控制是消除干扰和提高机械加工精度的主要手段之一。振动主动控制的前提是对频率在5kHz以上微振动信号进行准确测量。针对现有光纤光栅传感器在测量高频微振动信号上存在的频率低、结构复杂、无法分布式测量等不足,采用频率调制连续波(FMCW)技术结合光强度调制,设计了一种全光纤分布式微振传感器,并通过压电换能器(PZT)微振测量实验和仿真对传感器的性能进行验证,能够分布式测量频率最高为60kHz的微振动信号。

Vibration active control is one kind of main methods to eliminate interference and improve machining accuracy. The premise of vibration active control is the precise measurement of micro-vibration signal whose frequency is upper 5 kHz. A full-fiber micro-vibration distributed sensor is designed using frequency modulated consecutive wave （FMCW） and light intensity modulation technology, aiming at the shortage of existing grating sensor used for micro-vibration signal measurement, such as low frequency, complex structure and individual measurement etc. Through piezoelectric transducer （PZT） micro-vibration measuring experiment and simulation, it can prove that top frequency of 60 kHz for distributed measurement is achieved.