溶胶-凝胶陶瓷薄膜制备工艺技术的研究

Research on Technology for Preparing Ceramic Thin Film by Sol-Gel Process

本文从溶胶制备和薄膜涂覆工艺两方面对溶胶-凝胶法制备陶瓷薄膜中的工艺技术进行了研究,并指出了溶胶-凝胶技术中存在的一些问题。

The Technology for preparing ceramic thin films by means of Sol-Gel process was investigated with the aim at the preparation of Sol and coating of films. The technology problems of Sol-Gel process, which should be farther resolved,were also discussed.