具有快速分离效果多道微型气相色谱柱

Fast separation on MEMS-based multicapillary gas chromatographic columns

采用MEMS技术设计了一种多道微型气相色谱柱,运用深槽刻蚀技术(DRIE),对器件刻蚀深400μm,微型色谱柱总长度为50cm,每道宽40μm,4道多道柱。采用静态涂覆法对色谱柱涂覆SE-54固定相。将多道色谱柱与30 m长的安捷伦HP-5毛细管柱多道色谱柱比较,烷烃混合物在两种柱内都被完全分离,混合物在多道柱内的保留时间比在毛细管柱内缩短了两倍,塔板数达到15342 plates/m,是毛细管柱的3倍。多道色谱柱被用于分离苯,甲苯及苯酚致癌组分,所有组分在1 min之内被完全分离。在时间上比之前报道的6 m长微型色谱柱缩短了3倍,实现了快速分离效果。

In this report, microelectromechanical system （MEMS） technique was applied to fabrication of 50- cm-long,400 μm-depth and 40 μm-wide four-capillary gas chromatographic （GC） multi-capillary columns （MCCs）. The static coating as a coating method was applied. Meanwhile 95% Methyl and 5% Phenyl Polysilozane （SE-54） as stationary phase were coated on the column. In this experiment the MCC were compared with a 30m long Agilent HP-5 commercial capillary column. The N-alkane mixtures were perfectly separated on both columns. The retention time of N-alkane components was 2 times shorter than those on the capillary column. The plate number can reach 15342 plates/m. In addition, benzene, toluene and phenol which can cause cancer were separated by MCC. All components were separated within 1 rain and it was three times shorter than those previously reported.