滚转角测量方法综述

Survey of Rolling Angle Measurement Methods

精密直线运动系统在高端加工制造等领域具有重要地位,六自由度误差的高精度测量方法与技术是提高其精度的必要手段,而滚转角误差是其中最难测量的一个参数。总结并介绍了目前国内外的多种滚转角测量方法,给出了每种测量方法的原理和发展现状,比较了各种方法的优缺点,讨论了其发展趋势。

Precision moving tables are playing an important role in machine tools and measuring machines. In order to achieve higher motion accuracy, it is necessary to measure the motion errors of the moving table and feed back them to control the motion. In the six motion errors, rolling error is the most difficult one to measure. Several developed methods of rolling angle measurement are described in detail． The principle，the status of development and the application situations of each method are displayed．The advantages and disadvantages of them are compared．The trends in the fields are discussed.