摘要
研究了光学平面绝对检验的干涉测量方法:三面互检法。该方法需要三个被测平面,两两组合测量,就能够得到被测平面在通过其中心两个垂直方向的线轮廓数据。根据Matlab和VC混合编程思想,设计了带界面的三面互检计算软件,能够对任何一台干涉仪所采集到的实验数据进行快速计算,并进行了实验验证,得到了所测干涉仪参考平晶的绝对面形,相对于Zygo软件计算误差为3%。
An interferometric method for the absolute testing of optical flats, three- flat testing, is studied. This method needs three flats, which are combined in pairs in different positions, and measurements yield a vertical profile of data and a horizontal data profile along the diameter of the reference flat. According to Matlab and VC mixed programming, three- flat test of mutual inspection procedures is designed to quickly calculate experimental data with the help of an interferometer. Experiments are done to achieve high accuracy flatness measurement, and the calculation error is 3% relative to the Zygo software.
出处
《激光与光电子学进展》
CSCD
北大核心
2014年第4期145-149,共5页
Laser & Optoelectronics Progress
