摘要
为了满足应用对控制系统高速高精度的要求,本文将原子力显微镜作为控制对象,主要研究基于DSP—FPGA控制系统设计中的关键技术问题。包括各模块的功能划分、模块间通讯模式设计并以单行扫描为例进行编程说明。随后将PID算法嵌入FPGA,对大范围快速原子力显微镜的单点测试做闭环反馈控制。实验结果显示,与以PCI04为核心的控制系统相比,基于DSP—FPGA的控制系统大大提高了大范围快速原子力显微镜的扫描速度和控制精度。
In order to meet the requirements for high-speed and high-precision control system,researches and designs have been done on the use of DSP-FPGA-based control system where atomic force microscope is used as the control object.These designs included functional division of each module,communication pattern among modules,and a programming example of single line scan was presented.Then the PID algorithm was embedded in FPGA to do a closed- loop feedback control for single-point testing of a wide-range and high-speed atomic force microscope.Compared with PC104-based control system, great improvements in scanning speed and control precision of a wide-range and high-speed atomic force microscope were experimentally demonstrated by using DSP-FPGA-based control system.
出处
《现代科学仪器》
2014年第1期30-34,共5页
Modern Scientific Instruments
基金
基金资助:国家863计划,工业型扫描探针显微测试系统及关键技术(2012AA041204)
国家科技支撑计划,微纳技术计量标准和标准物质研究,2011BAK15800