分光路二维剪切干涉强激光腔镜变形检测系统

Optical-Path-Splitting 2-D Shearing Interferometer System for Deformation Study of High Power Laser Resonator Mirrors

介绍一种分光路二维剪切干涉光电检测系统。该系统实现了两正交方向 (二维 )同时进行检测与计算机自动化数据处理 ;采用了一系列消噪声措施和两图像相减等技术 ,使得波前重构中能较好地采用简单的数值积分方法 ;并得到了在± 10 μm的测量范围内 ,方差不超过 0 .2 57μm和0 .0 5μm的灵敏度。

An optical path splitting 2 D shearing interferometric opto electronic measuring system is introduced. The tests in two orthogonal directions can be implemented at the same time and the automation of data processing is achieved with the system and the simple method of digital integration can be well adopted in the wavefront reconstruction by taking a series of steps of removing noise and subtracting the mirror surface datum before and after the deformation. The measuring standard error is below 0.257 μm within ±10 μm range of the deformation and the sensitivity is 0.05 μm. The deformation dynamic tests of high power laser resonator mirror was successfully demonstrated in real time.